The University of Arizona

Hitachi S-4800 Type II Ultra-High Resolution Field Emission Scanning Electron Microscope

Hitachi S-4800

Overview (information taken from the Hitachi web site)

" The Hitachi S-4800 is a truly versatile platform comprising impressive high resolution performance, advanced detection technology, and a user interface that makes it possible to capture even the most short lived moments accurately and clearly. It employs a semi-in-lens design for large sample accommodation while achieving ultra-high resolution comparable to performance only available with in-lens UHR SEMs.


  • A new objective lens design with "Super ExB Filter" technology. Using a single detector, the Super ExB Filter collects and separates the various components of pure SE, compositional SE and BSE electron signals.
  • A guaranteed resolution of 1.4 / 2.0 nm at 1kV (deceleration / standard mode) for low voltage applications.
  • Type II specimen stage for large sample applications with 110mm x 110mm stage movement and computer controlled 5 axes motorization with graphical interface software.
  • Advanced dry vacuum system design including Turbo Molecular Pump (TMP).
  • A new GUI design developed in consultation with users making the S-4800 the most advanced, user friendly UHR SEM available today."



Secondary electron image resolution

  • 1.0nm (at 15kV)
  • 1.4nm (at 1kV, deceleration mode)
  • 2.0nm (at 1kV, standard mode)

Electron optics


Electron gun

  • Cold field emission electron source

Acc. voltage

  • 0.5 - 30kV (variable at 0.1kV/step)


  • X 20 - X 800.000

Objective aperture

  • 4 opening, selectable and alignable outside the vacuum (Heater built-in)


  • Secondary electron detector (upper/lower/upper + lower), (noise compensation using a beam monitor), (signal control function)
  • Transmitted electron detector
  • Energy dispersive X-ray detector

Specimen stage

Type II

  • X: 0 ~ 110 mm, Y: 0 ~ 110mm, Z: 1.5 ~ 40mm
  • Tilt: -5  +70 degrees
  • Rotation: 360 degrees


  • PC controlled 5 axes motor drive

Image display



  • PC/AT compatible, OS: Windows XP
  • 19" Flat panel display

Scan mode

  • Normal, Split/dual mag./line scan, position set, spot, AAF, SAA, oblique

Frame memory

  • 640 x 480 pixels, 1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels

Image processing

  • Image processing software, image filing software built-in

Image file format

  • BMP, TIFF, JPEG selectable

Scan speed

  • TV, slow (0.5 ~ 40 s/frame) for viewing
  • Slow (40 ~ 320 s/frame) for recording

Image processing

  • Automatic image brightness & contrast, raster rotation, auto focus, auto stigmation, averaging, frame integration, color display

Auto data recording

  • Film numbering, acc. voltage, micron bar with a scale, magnification, date, hours and working distance

Electrical image shift

  • +/-12 um (at W.D. = 8mm)

Vacuum system

  • Fully automated pneumatic valve control
  • Energy saving ECO mode
  • lon pumps 3 sets
  • TMP 1 set
  • RP 1 set


exchange chamber

Options - Thermo (information taken from the Thermo Scientific web site)

NanoTrace LN-Cooled Si(Li) Detector

The no compromises solution to high sensitivity, high resolution X-ray detection:

  • Excellent low energy performance
  • ISO 15632 compliance

Guaranteed performance on the electron microscope:

  • Mn resolution down to 129 eV
  • F resolution down to 65 eV
  • C resolution down to 62 eV
  • Dewar capacities is 10 liters
  • Light element detection down to beryllium

Thermo Scientific: The Spectral Imaging Brand
Over the past years, we have placed collecting and analyzing Spectral Imaging data at the core of the NORAN System SIX Microanalysis System. While others have developed look-alike features, only Thermo has developed a set of tools exclusively designed for Spectral Imaging data.

  • Automated Acquisition Parameters -- Eliminates guesswork and trial-and-error data collection
  • Quantitative X-ray Mapping -- Produces richer elemental distribution data
  • COMPASS -- Multivariate statistical analysis software producing "pure" components
  • Xphase -- Analyzes X-ray data to produce phase distributions
  • Spectral Match -- Matches spectral data with known alloys and compounds

When combined, these tools present a comprehensive analysis of the sample's composition, not just in terms of elemental distribution (x-ray maps), but as a complete representation of the sample's composition including the identification of compounds and alloys.

Using these advanced algorithms, Direct-to-Phase extracts and displays known phases while the data is still being collected. Now you can allow your EDS system to decide when sufficient statistics have been collected, or you can visualize the data as it develops.

Direct-to-Phase combines Thermo's advancements in Spectral Imaging analysis to produce the most comprehensive tool for understanding your sample's composition. Direct-to-Phase does much more than simply present elemental data in maps and spectra. It develops an information-rich picture of your sample's composition. And it produces complete data ten times faster than current X-ray microanalysis technology.

EDS Feature Sizing with Chemical Typing

Feature Sizing can measure dozens of parameters in a particle, including its area, its length and width, and its projections and inclusions. These measurements give you valuable information about the sample and can help determine its quality for industrial applications.

pdf Feature Sizing with Chemical Typing (891 Kb)

vpon box
Quartz Taipan

Real-Time Interactive Collaboration

The Hitachi S-4800 Type II (FESEM,STEM, EDS) is equipped with the Quartz PCI Collaboration Microscopy system that can enable interactive sessions through the internet. Our installed system will allow live video feeds of the FESEM LAB and SEM sessions. Images can be transfered and viewed rapidly through Quartz Taipan. The system can be used for off-site collaboration from laboratory to office or laboratory to classroom presentations. Distant and remote locations can now utilize our services.

Quartz Taipan - The Taipan Server Appliance is designed to capture data from almost any digital imaging instrument. With Taipan as the central archive for your laboratory, your data is only a network or Internet connection away. The Taipan Server Appliance provides large storage capacity and completely secure data accessibility via the LAN or through the Internet. See:

The Hitachi S-4800 SEM is house in the FESEM LAB I. The lab walls are finished with acoustic panels to reduce vibration interference.


Research and Industrial Clients - Contact Us



University Spectroscopy and Imaging Facilities